Semiconductor Solutions from Panametrics

Ultra-Precise Measurements for High-Purity Manufacturing

Panametrics precision measurements for Semiconductor Manufacturing

In semiconductor manufacturing, precision and purity are essential to maintaining yield and product quality. Panametrics delivers advanced flow, gas and moisture measurement solutions designed to support the demanding requirements of high-purity processes.

Our highly accurate technologies enable real-time monitoring of critical gases and moisture levels, helping to prevent contamination and ensure process stability. Engineered for reliability in cleanroom environments, Panametrics solutions support consistent performance across complex production stages.

By providing actionable data and dependable measurement, Panametrics helps semiconductor manufacturers optimize efficiency, protect sensitive equipment, and achieve greater control over their operations—driving higher yields and consistent results.

Flow Measurement

The semiconductor industry works with a high degree of water purity to be utilized in high-grade clean rooms, as well as high-purity gases and other chemicals for cleaning, etching, plating and planarization processes. Flow measurements in these high-purity processes must be maintained to deliver valuable outputs and run the process at its highest efficiency and availability for 24/7 operations.

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Oxygen and Moisture measurement

The semiconductor process requires high-purity gases and other chemicals for the cleaning, purging, etching, plating and planarization processes. Any moisture and oxygen contaminants in these gases, even at the parts-per-billion (ppb) level, can be detrimental to the process yield and to product quality. Reliable and repeatable measurement and control of these contaminants is critical.

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Featured Products

The Optica is Panametrics’ most capable chilled mirror hygrometer and a primary standard-grade dew point analyzer capable of simultaneous, real-time measurement of dew point, temperature, and pressure. When combined with high-performance chilled mirror s…
The OptiSonde is a compact, rugged chilled mirror hygrometer delivering NIST-traceable dew point and humidity measurement for laboratory and process environments. It combines proven chilled mirror accuracy with a simple user interface, built-in data logg…
High-accuracy chilled mirror sensors for precise dew point measurement across laboratory, HVAC, and industrial applications. The 1111H, D2, and 1211H are fully compatible with Panametrics OptiSonde and Optica analysers, delivering NIST-traceable performa…
The 1311-DR is a four-stage thermoelectric chilled mirror sensor delivering NIST-traceable dew/frost point measurement down to −65°C (air-cooled) or −75°C (liquid-cooled). Designed for use with the Panametrics Optica hygrometer, it is the sensor of choic…
The Panametrics air.IQ is a packaged moisture measurement system, specifically designed for clean gas measurements such as compressed air, nitrogen, or other inert low pressure gases. Combining the dew.IQ analyzer, an IQ.probe with onboard calibration da…
Clamp-on ultrasonic flowmeter for liquids that provides accurate, non-intrusive measurement with simple installation and low maintenance for water and industrial applications.
next-generation clamp-on ultrasonic liquid flowmeter engineered for applications where flexibility, redundancy, and measurement confidence are critical. Building on the proven AquaTrans AT600 platform, the AquaTrans AT620 introduces a dual-path / two-cha…
Fixed two path or two channel ultrasonic clamp-on flowmeter for liquids that delivers accurate, non-intrusive measurement with flexible installation and low maintenance for water and industrial applications.
Panametrics has over 50 years’ experience in designing sample systems that will provide safe and reliable readings for your moisture, oxygen, and binary gas measurements. Our application engineering team can either choose a standard designed sample syste…
The Delta F non-depleating electrochemical oxygen sensor provides ultra-stable trace oxygen measurement from ppm down to ppb levels, requiring only annual span calibration. Designed for high-sensitivity applications, it delivers reliable long-term perfor…
The moisture.IQ is a multichannel moisture analyzer that measures trace moisture in gases and non-aqueous liquids, with optional oxygen measurement. It supports up to six channels and provides accurate, real-time monitoring with an intuitive touchscreen …
The M Series Probe is an aluminum oxide moisture sensor designed for accurate measurement of trace to ambient moisture in gases and non-aqueous liquids. Known for fast response and long-term stability, it delivers reliable performance in demanding indust…
The MISP 2 Probe is an aluminum oxide moisture sensor designed for accurate measurement of trace to ambient moisture in gases and non-aqueous liquids. With built-in temperature and pressure sensing, it delivers high-precision, intrinsically safe performa…
A fixed ultrasonic liquid flowmeter that provides accurate, non-intrusive flow and energy measurements using clamp-on technology with no pressure drop and minimal maintenance.
A clamp-on ultrasonic gas flowmeter that enables accurate measurement of gas flow without cutting the pipe, eliminating pressure drop and minimising maintenance.
The Panametrics H2pure.IQ package combines trace moisture and oxygen measurements in a single compact cabinet. This packaged solution for moisture and oxygen transmitters simplifies selection and installation, allowing you to choose the appropriate trans…
The Panametrics O2.IQ simplifies and standardizes your options for reliable oxygen measurement in a variety of applications. At the heart of this package is the oxy.IQ analyzer supported by a sample conditioning system purposefully designed to maintain e…
The oxy.IQ is a compact, loop-powered oxygen transmitter designed for accurate oxygen measurement from trace ppm levels up to percent concentrations in industrial gas applications. utilizing advanced galvanic fuel cell sensor technology, it delivers reli…
Permanent clamp-on ultrasonic liquid flowmeter that provides accurate, non-intrusive flow measurement with advanced signal processing for process applications.
The Panametrics pro.IQ provides reliable, accurate moisture measurement by combining the world class HygroPro II transmitter with a configurable sample system designed for your particular application and installation. Suitable for hydrocarbon gases and l…
A portable clamp-on ultrasonic gas flowmeter that provides accurate, non-intrusive flow measurement for a wide range of gases with no pressure drop and minimal maintenance.
A portable clamp-on ultrasonic flowmeter that enables fast, non-intrusive measurement of liquid flow with high accuracy, ease of use, and no process interruption.

Semiconductor Solutions Brief

Precision, reliability and availability matter in any business, but their importance in semiconductor manufacturing can hardly be overstated, particularly in the
measurable components of the process.

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Our team of experts can help you find the right solution for your space application needs.